Product Description

The ZYGO ZMI-2002 is a professional dual-axis laser interferometer measurement board built on 6U VME bus architecture. It serves as the core high-precision signal acquisition and computing unit for laser measurement systems, realizing nanometer-level displacement, velocity and position detection to support ultra-precision machining and scientific measurement applications.

Adopting advanced optical signal demodulation and high-speed digital processing technology, this module delivers sub-nanometer resolution and micron-level repeatability. It features 25ns ultra-fine time resolution, 36-bit high-precision position data output and complete error diagnosis logic. With compact industrial modular design and stable bus transmission, it ensures long-term accurate and consistent measurement for high-end precision industrial scenarios.

Main Specifications

1. Full Model: ZMI-2002; Product Type: 6U VME bus dual-axis laser interferometer precision measurement board
2. Applicable System: ZYGO ZMI2000 laser interferometer system, precision industrial detection and positioning platforms
3. Core Function: Dual-axis displacement/velocity measurement, optical signal processing and high-precision data output
4. Measurement Performance: Ultra-high resolution <1nm, positioning accuracy up to ±0.1μm for precision detection
5. Data Bit Depth: 36-bit position data and 32-bit velocity data with standard two's complement format
6. Time Index: 25ns ultra-high time resolution and maximum 107.4s continuous measurement time range
7. Signal Interface: Supports reference and measurement dual-channel fiber optic signal receiving and parsing
8. Bus Standard: Standard 6U VME industrial bus for stable and high-speed system data interaction
9. Power Parameter: 12V±10% industrial DC power supply with low power consumption and stable operation
10. Operating Environment: 0°C to +40°C temperature range, industrial anti-interference precision measurement design

Core Functions

1. Acts as the core dual-axis precision measurement processing unit for ZYGO laser interferometer systems.
2. Receives and demodulates optical fiber signals to convert laser interference signals into digital data.
3. Realizes real-time high-precision displacement and velocity calculation for dual-axis synchronous detection.
4. Outputs high-resolution 36-bit position data to ensure ultra-precision positioning measurement accuracy.
5. Supports long-duration continuous measurement with stable time base indexing and data synchronization.
6. Integrates comprehensive signal fault diagnosis to monitor optical path and signal abnormal status in real time.
7. Adopts high anti-interference algorithm to eliminate environmental vibration and optical noise interference.
8. Optimizes data output stability to improve repeatability of precision measurement results.
9. Enables seamless docking with upper industrial control and analysis systems via VME bus.
10. Guarantees reliable and high-precision measurement output for ultra-precision manufacturing processes.

Application Scenarios

1. Semiconductor wafer processing ultra-precision positioning and displacement detection systems
2. Optical component manufacturing high-precision contour and surface measurement scenarios
3. Precision mechanical parts micron-level dimensional inspection and calibration projects
4. Aerospace equipment precision component testing and parameter verification platforms
5. Laboratory scientific research ultra-high precision laser interferometry measurement systems
6. High-end CNC machine tools real-time positioning accuracy monitoring and compensation scenarios
7. Microelectronic equipment ultra-precision motion calibration and error correction projects
8. Old ZYGO laser measurement system core acquisition board replacement and upgrading
9. Precision automation equipment dual-axis synchronous motion precision detection systems
10. Industrial high-end quality inspection ultra-precision dimensional measurement scenarios