LAM Research 715-045710-807 Upper Focus Ring

LAM Research 715-045710-807 is an upper focus ring designed for LAM semiconductor plasma etching equipment. It is a critical consumable component installed around the wafer, which shapes the plasma electric field and stabilizes plasma distribution during wafer etching processes.

Manufactured from high-purity ceramic material with precision machining, this focus ring delivers excellent resistance to plasma corrosion and minimizes particle generation. It maintains consistent process uniformity for batch wafer production. Widely used as replacement spare parts in 300mm wafer fabrication fabs.

Main Specifications

• Brand: LAM Research
• Part Number: 715-045710-807
• Product Type: Upper Focus Ring
• Material: High purity ceramic
• Applicable Equipment: LAM 300mm plasma etch processing chamber
• Process Environment: High vacuum plasma etching chamber
• Function Position: Surrounding edge of 12-inch wafer
• Surface Treatment: Precision polished clean surface
• Tolerance: Ultra-tight dimensional machining tolerance
• Max Operating Temperature: 200°C

Core Functions

• Adjust plasma electric field distribution to improve wafer edge etching uniformity
• Protect wafer edge from abnormal plasma bombardment and edge yield loss
• Resist erosion of reactive process gas and high-energy plasma particles
• Low particle emission performance meets strict semiconductor cleanroom standards
• Stabilize repeatability of etching results for long-term mass production batches
• Standard mechanical structure enables quick installation and replacement during maintenance
• Reduce abnormal defects caused by uneven plasma on wafer edge regions
• Maintain stable impedance environment inside the vacuum reaction chamber
• Extend service cycle of other expensive chamber internal components
• Guarantee consistent wafer processing quality in continuous fabrication operations

Application Scenarios

• 12-inch semiconductor wafer manufacturing plasma etching chambers
• Logic chip, memory chip and power semiconductor production lines
• Semiconductor foundry factory front-end process equipment maintenance
• Display panel and compound semiconductor wafer etching production equipment
• Fab regular preventive maintenance and consumable replacement projects
• Semiconductor equipment refurbishment, upgrade and spare parts stocking
• Microelectronics research laboratory process platform equipment
• High-end wafer fabrication plant consumable spare parts inventory management
• Plasma process equipment cleanroom production automation workshops
• LAM semiconductor chamber ceramic consumable supply and trading projects